Reflective liquid-crystal display apparatus and manufacturing method thereof
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United States of America Patent
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Apr 23, 2013
Grant Date -
Oct 20, 2011
app pub date -
Mar 25, 2011
filing date -
Apr 15, 2010
priority date (Note) -
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Abstract
A method for manufacturing a reflective liquid-crystal display apparatus is provided. The method includes: forming, over a substrate, a first metal layer and a first insulating layer having an opening and a first through-hole in order; forming a metal portion filled in the opening and a first plug filled in the first through-hole, by forming a metal film over the first insulating layer and planarizing the metal film until the first insulating layer is exposed; forming, over the first insulating layer, a second insulating layer, a second metal layer having an opening, and a third insulating layer in order; forming, in the second and third insulating layer, a second through-hole that passes through the opening of the second metal layer and exposes an upper face of the first plug; and forming a second plug filled in the second through-hole, and a reflective electrode connected to the second plug.
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