On-chip optical waveguide
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United States of America Patent
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Apr 23, 2013
Grant Date -
Jun 16, 2011
app pub date -
Dec 16, 2009
filing date -
Dec 16, 2009
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Abstract
Systems and methods according to these exemplary embodiments provide for on-chip optical waveguides, methods of making on-chip optical waveguides, and devices including such on-chip optical waveguides. A dielectric layer formed from, e.g., transparent spacer dielectric material, forms a waveguide core and can be surrounded or substantially surrounded by a metal cladding layer. The metal cladding layer can be formed in the chip using backend metallization techniques, e.g., Damascene processing.
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