Spin coating modeling
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United States of America Patent
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Apr 23, 2013
Grant Date -
Mar 3, 2011
app pub date -
Aug 12, 2010
filing date -
Aug 28, 2009
priority date (Note) -
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Abstract
A method for setting processing parameters for fabricating an integrated circuit, by creating a mathematical model of a spin coated surface of a material over a non-flat substrate surface, where the mathematical model includes, a smoothing algorithm, where the smoothing algorithm uses as inputs only, a nominal thickness of the spin coated surface, a minimum thickness of the spin coated surface, and an interaction length, and a constraint that the spin coated surface cannot intersect the substrate surface, solving the mathematical model to determine the spin coated surface, and using the modeled spin coated surface to set the processing parameters for fabricating the integrated circuit.
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