Inertial sensor and method of manufacturing the same
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United States of America Patent
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Apr 30, 2013
Grant Date -
Mar 3, 2011
app pub date -
Apr 17, 2009
filing date -
Apr 17, 2009
priority date (Note) -
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Abstract
An inertial sensor capable of making pressure of a space in which an inertial sensor such as an acceleration sensor is placed to be higher than that during a sealing step and improving reliability is provided. The inertial sensor can be achieved by means of making an inertial sensor including a substrate, a movable portion on the substrate, a cap member which seals the movable portion so as to cover the movable portion, wherein a gas-generating material is applied to the movable portion side of the cap.
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