Micromechanical pressure-sensor element and method for its production
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United States of America Patent
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Apr 30, 2013
Grant Date -
Sep 1, 2011
app pub date -
Feb 25, 2011
filing date -
Mar 1, 2010
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Abstract
A very robust sensor element for an absolute-pressure measurement is described, which is suitable for high temperatures and able to be miniaturized to a large extent. The micromechanical pressure-sensor element includes a sensor diaphragm having a rear-side pressure connection and at least one dielectrically insulated piezo resistor for signal acquisition. Furthermore, the pressure-sensor element has a front-side reference volume, which is sealed by a cap structure spanning the sensor diaphragm. The cap structure is realized as thin-film structure.
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