Coating apparatus
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United States of America Patent
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-
Apr 30, 2013
Grant Date -
Jan 20, 2011
app pub date -
Feb 26, 2010
filing date -
Jul 20, 2009
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A coating apparatus includes a chamber device and a transporting device. The chamber device defines two separated coating chambers, two coating channels, which are alternately arranged, two coating slots communicating the coating chambers with the coating channels respectively, and a transportation channel extending to intersect the coating chambers and the coating channels and communicate with the coating channels. The transporting device includes a carrying board for carrying a substrate to be coated and an a driver for driving the carrying board to move along the transportation channel and to rotate the carrying board into one of the coating channels so that the substrate faces and aligns a corresponding coating chamber via a corresponding coating slot.
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