Master for producing stamper
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United States of America Patent
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Apr 30, 2013
Grant Date -
Jan 3, 2013
app pub date -
Sep 13, 2012
filing date -
Apr 2, 2010
priority date (Note) -
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status (Latency Note)
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Abstract
In one embodiment, there is provided a master for producing a stamper. The master includes: a substrate made of a first material and comprising a first surface, wherein the first surface of the substrate is formed with a groove; a first layer made of a second material and formed in the groove, wherein the second material is different from the first material, and wherein a surface of the first layer is substantially flush with the first surface of substrate; and a projection portion formed on at least one of the first surface of the substrate and the surface of the first layer. The first material is silicon and the second material is selected from silicon oxide, aluminum oxide, titanium oxide, and glass.
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