Compound, resin, resist composition and method for producing resist pattern

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United States of America Patent

PATENT NO 8431325
APP PUB NO 20110053086A1
SERIAL NO

12873919

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A compound of the present invention is represented by the formula (A);

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO CHEMICAL COMPANY LIMITEDTOKYO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hashimoto, Kazuhiko Toyonaka, JP 91 1995
Ichikawa, Koji Toyonaka, JP 316 1995

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