Salt and photoresist composition comprising the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8431326
APP PUB NO 20120088190A1
SERIAL NO

13251334

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention provides a salt represented by the formula (I):

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO CHEMICAL COMPANY LIMITEDTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hiraoka, Takashi Osaka, JP 52 939
Ichikawa, Koji Osaka, JP 316 1995
Ochiai, Mitsuyoshi Osaka, JP 14 84

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