Importance

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Abstract

An embodiment is a manufacturing method of a semiconductor device including the steps of forming a first insulating film; forming a first mask over the first insulating film; performing a slimming process on the first mask to form a second mask; performing an etching process on the first insulating film using the second mask to form a second insulating film; forming a first conductive film covering the second insulating film; performing a polishing process on the first conductive film and the second insulating film to form a third insulating film, a source electrode, and a drain electrode having equal thicknesses; forming an oxide semiconductor film over the third insulating film, the source electrode, and the drain electrode; forming a gate insulating film over the oxide semiconductor film; and forming a gate electrode in a region which is over the gate insulating film and overlaps with the third insulating film.

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First Claim