Methods of forming electrically conductive plugs and method of forming resistance variable elements
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United States of America Patent
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Apr 30, 2013
Grant Date -
Jul 26, 2007
app pub date -
Mar 26, 2007
filing date -
May 11, 2005
priority date (Note) -
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Abstract
A method of forming an electrically conductive plug includes providing an opening within electrically insulative material over a node location on a substrate. An electrically conductive material is formed within the opening and elevationally over the insulative material. Some of the conductive material is removed effective to recess an outermost surface of the conductive material to from about 100 Angstroms to about 200 Angstroms from an outermost surface of the insulative material after said removing of some of the conductive material. After removing some of the conductive material, remaining volume of the opening over the conductive material is overfilled with an electrically conductive metal material different from that of the conductive material. The metal material is polished effective to form an electrically conductive plug within the opening comprising the conductive material and the metal material. Other aspects and implementations are contemplated.
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