Charged particle beam processing method
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United States of America Patent
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Apr 30, 2013
Grant Date -
Aug 26, 2010
app pub date -
Feb 16, 2010
filing date -
Feb 23, 2009
priority date (Note) -
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Abstract
In a method for processing a surface of an object by radiating a plurality of charged particle beams to the surface of the object while moving the charged particle beams relative to the surface of the object, steps includes radiating a first charged particle beam and a second charged particle beam simultaneously to the surface of an object, and controlling a relative speed of the movement of the first charged particle beam to the surface of the object to correct the shape of the surface of the object with the first charged particle beam. In addition, the second charged particle beam is controlled according to a variation in the relative speed of the movement of the first charged particle beam so as to make a number of particles of the second charged particle beam that reach a unit area of the surface of the object constant, thereby smoothing the surface of the object.
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