Importance

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Abstract

An ESD protection device includes a semiconductor body, a gate formed over a channel in the semiconductor body, the channel being doped with a first concentration of dopants of a first conductivity type. A first source/drain region is formed on the surface of the semiconductor body adjacent to a first edge of the gate, wherein the first source/drain region is doped with a dopant of a second conductivity type opposite the first conductivity type, and at least a portion of the first source/drain region is doped with a dopant of the first conductivity type. The concentration of the second conductivity type dopant exceeds the concentration of the first conductivity type dopant, and the concentration of the first conductivity type dopant in the first source/drain exceeds the first concentration. A second source/drain region is also formed at the upper surface of the semiconductor body adjacent to a second edge of the gate, wherein the second source/drain region is doped with a dopant of the second conductivity type.

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First Claim