Silicon carbide semiconductor device

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United States of America Patent

PATENT NO 8431974
SERIAL NO

12846400

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Abstract

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According to the embodiment, a semiconductor device includes an SiC substrate of a first or second conductivity type. An SiC layer of the first conductivity type is formed on a front surface of the substrate, a first SiC region of the second conductivity type is formed on the SiC layer, a second SiC region of the first conductivity type is formed within a surface of the first SiC region, a gate dielectric is continuously formed on the SiC layer, the second SiC region, and the surface of the first SiC region interposed between the SiC layer and the second SiC region, a gate electrode is formed on the gate dielectric, a first electrode is embedded in a trench selectively formed in a part where the first SiC region adjoins the second SiC region, and a second electrode is formed on a back surface of the substrate.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA TOSHIBAKAWASAKI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kono, Hiroshi Kawasaki, JP 105 772
Shinohe, Takashi Yokosuka, JP 171 1613
Suzuki, Takuma Kawasaki, JP 73 382

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