Importance

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Abstract

Disclosed is a method of appropriately and easily selecting a combination of two different frequencies of an AC exciting signal used for eddy current measurement while decreasing or removing the dependence of the measurement accuracy on temperature. Three or more AC exciting signals of different frequencies are applied to an object under measurement by an exciting coil, and an induced current is produced. Detection signals corresponding to the frequencies are detected by a detection coil, and the phase difference between each detection signal and the AC exciting signal corresponding to each frequency is calculated from the detection signals corresponding to the frequencies. From the phase differences, a combination of two frequencies the phase differences of which are within a predetermined range is extracted. The lower frequency of the extracted combination is used for a first frequency, and the higher one is used as a second frequency. Thus, the combination of two frequencies are selected.

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First Claim