MEMS device and oscillator
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United States of America Patent
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Apr 30, 2013
Grant Date -
Sep 15, 2011
app pub date -
Mar 11, 2011
filing date -
Mar 12, 2010
priority date (Note) -
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Abstract
A MEMS device includes a substrate, a cavity formed above the substrate, a first vibrator contained in the cavity, and a second vibrator contained in the cavity and having a natural frequency different from that of the first vibrator. The first vibrator and the second vibrator are preferably arranged along a long side of the cavity having a rectangular shape in plan view.
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