High frequency device
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United States of America Patent
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Apr 30, 2013
Grant Date -
Mar 3, 2011
app pub date -
Aug 20, 2010
filing date -
Aug 27, 2009
priority date (Note) -
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Abstract
A high frequency device having a membrane structure with improved mechanical strength is provided. The high frequency device includes: a substrate having an aperture; a first dielectric layer that is formed from a material having etching selectivity in relation to a material of the substrate and is provided on the substrate to cover the aperture; a second dielectric layer on the first dielectric layer; and a high frequency element provided in a position opposed to the aperture on the second dielectric layer.
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