Projection optical system with rarefaction compensation
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United States of America Patent
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Apr 30, 2013
Grant Date -
Apr 15, 2010
app pub date -
Oct 12, 2009
filing date -
Oct 14, 2008
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention provides a projection optical system for projecting a pattern of an object plane onto an image plane, including a first lens whose refractive index irreversibly increases by ultraviolet irradiation, and a second lens whose refractive index irreversibly decreases by the ultraviolet irradiation.
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