Micro-structure
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United States of America Patent
Stats
-
Apr 30, 2013
Grant Date -
Sep 30, 2010
app pub date -
Jan 18, 2010
filing date -
Mar 26, 2009
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A micro-structure produced by utilizing a MEMS technology or the like includes: a frame including a portion having a first layer and a portion having a second layer on the lower side of the first layer; a movable body including a portion having the first layer and a portion having the second layer; and at least one swing supporting portion which is having the first layer, and connects the portion having the first layer in the frame and the portion having the first layer in the movable body, to support the movable body to be capable of swinging. A frame side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the frame, and a movable body side end portion of the swing supporting portion is supported from underneath by the portion having the second layer in the movable body.
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