Microstructural body and production method therefor
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United States of America Patent
Stats
-
Apr 30, 2013
Grant Date -
Sep 22, 2011
app pub date -
Mar 14, 2011
filing date -
Mar 16, 2010
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A microstructural body includes a substrate such as an electrode substrate, a support portion, one post that fixes the support portion to the substrate, a frame-shaped movable portion provided around outer periphery of the support portion, and an elastic support portion that elastically connects the movable portion and the support portion. The elastic support portion supports the frame-shaped movable portion such that the movable portion is movable relative to the support portion. The elastic support portion includes torsion springs and an elastically deformable connecting portion.
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