Semiconductor test apparatus and test method
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United States of America Patent
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Apr 30, 2013
Grant Date -
Jun 24, 2010
app pub date -
May 12, 2008
filing date -
May 28, 2007
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Abstract
In a semiconductor test apparatus, a voltage source generates a power supply voltage to be supplied to a DUT. A decision processor makes the DUT execute a predetermined test sequence. A noise generator superimposes a periodic pulse-like noise voltage on the power supply voltage to be supplied to the DUT, while the test sequence is being executed. The noise generator superimposes a noise voltage synchronized with a clock signal to be supplied to the DUT.
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