Substrate carrying apparatus having circumferential sidewall and substrate processing system
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United States of America Patent
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May 7, 2013
Grant Date -
Aug 5, 2010
app pub date -
Feb 2, 2010
filing date -
Feb 4, 2009
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Disclosed is a substrate carrying apparatus having a simple configuration capable of inhibiting the occurrence of pattern collapse. A carrying tray of the disclosed substrate carrying apparatus includes a bottom plate for supporting the substrate and a circumferential side wall being provided around the bottom plate. An opening is formed in the bottom plate. An elevating member, to and from which the substrate is to be transferred, passes through the opening. A space is temporarily formed in a carrying tray. The elevating member within the opening passes to the outside of the carrying tray through the space. When the substrate is carried, the liquid is reservoired within the carrying tray, and the substrate is carried while the liquid remained on the upper surface of the substrate.
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