Evaporation apparatus, method of manufacturing anode using same, and method of manufacturing battery using same
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United States of America Patent
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May 7, 2013
Grant Date -
Mar 5, 2009
app pub date -
Aug 25, 2008
filing date -
Sep 5, 2007
priority date (Note) -
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Abstract
An evaporation apparatus that is capable of stably forming a good quality thin film and is highly suitable for mass production is provided. The evaporation apparatus include an evaporation source discharging an evaporation material by heating, a retention member retaining an evaporation object, and a heat shield member that is located between the evaporation source and the evaporation object retained by the retention member, has an opening for passing the evaporation material in a state of vapor phase from the evaporation source to the evaporation object, and shields the evaporation object from part of radiation heat of the evaporation source. The heat shield member is located closer to the evaporation source than to the retention member.
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