Tunable contact angle process for immersionlithography topcoats and photoresists

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May 7, 2013
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Jul 10, 2008
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Aug 8, 2006
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Aug 8, 2006

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Abstract

A process for tuning the water contact angle of an immersion photoresist layer or immersion topcoat layer by modification of the top surface. The surface modification is a layer of fluorinated polymer.

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Patent Owner	Address
INTERNATIONAL BUSINESS MACHINES CORPORATION	NEW ORCHARD ROAD ARMONK NY 10504

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G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

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Inventor Name	Address	# of filed Patents	Total Citations
Goldfarb, Dario Leonardo	Mohegan Lake, US	5	56

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Tunable contact angle process for immersionlithography topcoats and photoresists

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United States of America Patent

11500663

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PATENT NO	8435719
APP PUB NO	20080166667A1
SERIAL NO	11500663
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
May 07, 2013	US,8435719,B2 US8435719B2	GRANTED PATENT AS SECOND PUBLICATION
July 10, 2008	US,20080166667,A1 US20080166667A1	FIRST PUBLISHED PATENT APPLICATION

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11500663

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