Infrared light transmissivity for a membrane sensor
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United States of America Patent
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May 7, 2013
Grant Date -
Mar 15, 2012
app pub date -
Sep 9, 2010
filing date -
Sep 9, 2010
priority date (Note) -
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Abstract
In conventional membrane infrared (IR) sensors, little to no attention has been paid toward transmissivity of IR near metal traces. Here, because the substrate of an integrated circuit carrying the sensor is used as a visible light filter, reflection of IR radiation back into the substrate can affect the operation and reliability of the IR sensor. As a result, an arrangement is provided that reduces the area occupied by metal lines by reducing the pitch and compacting the routing so as to reduce the effects from the reflection of IR radiation by metal traces.
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