Hollow sealing structure and manufacturing method for hollow sealing structure
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United States of America Patent
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May 7, 2013
Grant Date -
Jun 23, 2011
app pub date -
Mar 7, 2011
filing date -
May 31, 2007
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A manufacturing method for a hollow sealing structure, includes, a process for filling a recessed portion in a principal surface of a substrate with a first sacrificial layer, a process for forming a functional element portion on the principal surface of the substrate, a process for forming a second sacrificial layer on the functional element portion so as to be connected to a part of the first sacrificial layer, a process for forming a covering portion over respective surfaces of the first and second sacrificial layers, a process for circulating a fluid for sacrificial layer removal through an opening in the covering portion in contact with the first sacrificial layer, thereby removing the first and second sacrificial layers, and a process for closing the opening.
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