Piezoelectric vibrator having a piezoelectric vibrating strip and a bonding film with laser irradiation marks
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United States of America Patent
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May 7, 2013
Grant Date -
Jan 27, 2011
app pub date -
Jul 23, 2010
filing date -
Jul 24, 2009
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Provide a highly efficient manufacturing method of a piezoelectric vibrator and to provide a piezoelectric vibrator manufactured by this manufacturing method. A method for manufacturing a piezoelectric vibrator 1 including: a base board 2 and a lid board 3 which are superimposed on each other so as to form a cavity therebetween; a piezoelectric vibrating reed 4 which is accommodated in the cavity and bonded to the base board; a bonding film 35 which is formed on the entire surface of the lid board on the opposite side to the base board so as to bond both boards to each other at a portion thereof being in contact with the base board, wherein the piezoelectric vibrating reed includes a pair of vibrating arms 10 and 11 and a weight metal film 21 formed on a tip end of each of the vibrating arms, wherein the bonding film is formed of a material which is capable of absorbing surrounding gas by being activated with laser irradiation, and wherein the method includes a laser irradiation step of simultaneously irradiating the weight metal film and the bonding film with a laser beam.
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