Infrared emitter arrangement for high-temperature vacuum processes

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United States of America Patent

PATENT NO 8436523
APP PUB NO 20110248621A1
SERIAL NO

13140609

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Abstract

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An infrared emitter has at least one emitter tube (11) having pinched sections at each of its ends. At least one opaque tube portion (12) is arranged in a manner welded in alignment with the at least one emitter tube. The infrared emitter may be installed in a processing chamber (21).

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Patent Owner(s)

  • HERAEUS NOBLELIGHT GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Linow, Sven Darmstadt, DE 27 97

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