Illumination optical apparatus, relay optical system, exposure apparatus, and device manufacturing method
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United States of America Patent
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May 7, 2013
Grant Date -
Oct 23, 2008
app pub date -
Apr 3, 2008
filing date -
Apr 20, 2007
priority date (Note) -
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Abstract
An illumination optical apparatus guides to an illumination object a light beam emitted from a light source. The illumination optical apparatus includes an enlarging optical system, disposed between the light source and the illumination object, and a reduction optical system, disposed between the enlarging optical system and the illumination object. The enlarging optical system is formed so that an image plane is disposed between the light source and the illumination object.
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