Displacement sensor with embedded coherent electromagnetic radiation interferometer for micro scale proximity measurements
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United States of America Patent
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May 7, 2013
Grant Date -
Jun 28, 2012
app pub date -
Dec 2, 2010
filing date -
Dec 2, 2010
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Abstract
The present invention is an interferometer sensor which uses frequency modulated coherent electromagnetic radiation to noncontact measure the displacement of moving targets with high precision. The sensor has an embedded interferometer comprised of an electromagnetic radiation source, a plurality of electromagnetic waveguides, interferometric and extension waveguides, a refractive index gel, or angled end face and an electromagnetic radiation detector.
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