Computer generated hologram and exposure apparatus to suppress an illumination variation and loss in light
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United States of America Patent
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May 7, 2013
Grant Date -
Sep 2, 2010
app pub date -
Dec 12, 2008
filing date -
Dec 28, 2007
priority date (Note) -
Expired
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Abstract
A present invention provides a computer generated hologram which forms a light intensity distribution on a predetermined plane by giving a phase distribution to a wavefront of incident light, the hologram including a first anisotropic cell and second anisotropic cell configured to change a polarization state of the incident light, and a first isotropic cell and second isotropic cell configured not to change the polarization state of the incident light, wherein a direction of an optic axis of the first anisotropic cell is different from a direction of an optic axis of the second anisotropic cell, and a thickness of the first isotropic cell is different from a thickness of the second isotropic cell.
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