Interferometric modulator array with integrated MEMS electrical switches
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United States of America Patent
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May 7, 2013
Grant Date -
Oct 11, 2012
app pub date -
Jun 20, 2012
filing date -
Sep 27, 2004
priority date (Note) -
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Abstract
An array of display elements, such as interferometric modulators, is integrated with collapsible cavity microelectromechanical system (MEMS) electrical switches. The electrical switches and the display elements may be at least partially formed with the same manufacturing operations. The switches may form row or column select functions for the display elements.
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