Individually addressable nano-scale mechanical actuators
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United States of America Patent
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May 7, 2013
Grant Date -
Jan 5, 2012
app pub date -
Jun 30, 2009
filing date -
Jun 30, 2009
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Abstract
An addressable nano-scale mechanical actuator is formed at the intersection of two nanowires. The actuator has an active region disposed between the two nanowires, which form the electrodes of the actuator. The active region contains an electrolytically decomposable material. When an activation voltage is applied to the electrodes, the material releases a gas that forms a bubble at one electrode, causing a bulging of a top surface of the actuator. The bulging may be used, via mechanical coupling, to provide mechanical actuation on a nanometer scale. The nanowires may be arranged in a two-dimensional array to provide an array of individually addressable actuators.
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