Method and system for inspecting multi-layer reticles
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United States of America Patent
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May 7, 2013
Grant Date -
Jul 28, 2011
app pub date -
Jan 27, 2010
filing date -
Jan 27, 2010
priority date (Note) -
Expired
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Abstract
A method of and system for inspecting multi-layer reticles. The method includes: selecting a multi-layer reticle having an array of cells arranged in R rows and C columns; defining a full inspection region that includes all cells of the array of cells; and when R is equal to one (or is greater than two) and C is greater than two (or is equal to one) and a cell of the array of cells is a dummy cell in a first or last position of a row (or of a column) of the array of cells, then reducing the full inspection region to generate a shrunken inspection region that does not include the dummy cell, and then inspecting the shrunken inspection region for defects. If the dummy cell is between two non-dummy cells, then the dummy cell is a copy of one of the non-dummy cells, but is not inspected.
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