Original plate evaluation method, computer readable storage medium, and original plate manufacturing method
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United States of America Patent
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May 7, 2013
Grant Date -
Feb 28, 2013
app pub date -
Mar 22, 2012
filing date -
Aug 26, 2011
priority date (Note) -
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Abstract
According to one embodiment, an original plate evaluation method is disclosed. The original plate includes a substrate and N patterns differing from one another in shape. The method includes selecting N1 patterns from the N patterns based on first criterion, obtaining measured values for the N1 patterns, performing a decision whether the obtained measured values satisfy first specification value, selecting N2 patterns from the N patterns based on second criterion, predicting shapes of transfer patterns corresponding to N2 patterns, performing a decision whether the predicted shapes satisfy second specification value, and evaluating the plate based on the decision.
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