Linear semiconductor processing facilities

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United States of America Patent

PATENT NO 8439623
APP PUB NO 20060263177A1
SERIAL NO

11382491

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Abstract

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Methods and systems are provided for handling materials, including materials used in semiconductor manufacturing systems. The methods and systems include linear semiconductor processing facilities for vacuum-based semiconductor processing and handling, as well as linkable or extensible semiconductor processing facilities that can be flexibly configured to meet a variety of constraints.

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Patent Owner(s)

  • BROOKS AUTOMATION, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
van, der Meulen Peter Newburyport, US 86 1997

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