Imaging devices, methods of forming same, and methods of forming semiconductor device structures
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United States of America Patent
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May 14, 2013
Grant Date -
Jul 12, 2012
app pub date -
Jan 7, 2011
filing date -
Jan 7, 2011
priority date (Note) -
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Abstract
An imaging device comprising at least one array pattern region and at least one attenuation region. A plurality of imaging features in the at least one array pattern region and a plurality of assist features in the at least one attenuation region are substantially the same size as one another and are formed substantially on pitch. Methods of forming an imaging device and methods of forming a semiconductor device structure are also disclosed.
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