Graded topcoat materials for immersion lithography
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United States of America Patent
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May 14, 2013
Grant Date -
Jul 1, 2010
app pub date -
Jan 14, 2010
filing date -
Jun 15, 2007
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A topcoat material for immersion lithography and a method of performing immersion lithography using the topcoat material. The topcoat material includes a mixture of a first polymer and a second polymer. The first and second polymers of the topcoat material, when the topcoat material is formed into a topcoat layer between an immersion fluid and a photoresist layer, disperse non-homogenously throughout the topcoat layer.
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