Resonator element and resonator pixel for microbolometer sensor

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United States of America Patent

PATENT NO 8441094
APP PUB NO 20110304005A1
SERIAL NO

13202656

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Abstract

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A resonator element for the absorption and/or conversion of electromagnetic waves having a predefined wavelength, in particular infrared radiation having a wavelength of 2 μm to 200 μm, into heat, has a three-layer structure formed of a first metal layer, a second metal layer and a dielectric layer interposed between the two metal layers. The maximum lateral dimension of the layers is in the range between one quarter and a half of the predefined wavelength.

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Patent Owner(s)

Patent OwnerAddress
AIT AUSTRIAN INSTITUTE OF TECHNOLOGY GMBH1220 WIEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brueckl, Hubert Wiener Neudorf, AT 8 62
Maier, Thomas Vienna, AT 205 1047

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