Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods
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United States of America Patent
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May 14, 2013
Grant Date -
Aug 4, 2011
app pub date -
Apr 11, 2011
filing date -
Mar 27, 2006
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An assembly including a conditioning system and an object moveable into and/or out of an area to be conditioned is disclosed. The conditioning system has fluid outlet passages to supply conditioning fluid to the area to be conditioned and is configured to adjust outflow of the conditioning fluid from the fluid outlet passages depending on a position of the object.
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