Apparatus and method for batch non-contact material characterization
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United States of America Patent
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May 14, 2013
Grant Date -
Oct 4, 2012
app pub date -
Jun 13, 2012
filing date -
Feb 15, 2008
priority date (Note) -
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Abstract
An apparatus for performing non-contact material characterization includes a wafer carrier adapted to hold a plurality of substrates and a material characterization device, such as a device for performing photoluminescence spectroscopy. The apparatus is adapted to perform non-contact material characterization on at least a portion of the wafer carrier, including the substrates disposed thereon.
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