Auto-sequencing multi-directional inline processing apparatus

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United States of America Patent

PATENT NO 8444364
APP PUB NO 20110142573A1
SERIAL NO

12965798

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Abstract

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An apparatus and method for concurrent processing of several substrates. The system employs a novel architecture which, while being linear, may autonomously sequence processing and move substrates in different directions as necessary. The system moves several substrates concurrently; however, unlike the prior art it does not utilize trays.

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Patent Owner(s)

Patent OwnerAddress
KLA CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Berkstresser, David Eric Los Gatos, US 5 43
Blonigan, Wendell Thomas Pleasanton, US 10 148
Kleinke, Steve San Jose, US 6 114
Law, Kam S San Jose, US 68 7199
Stevens, Craig Lyle Ben Lomond, US 7 108
Toshima, Masato Sunnyvale, US 24 2507

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