Method for removing copper oxide layer
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United States of America Patent
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May 21, 2013
Grant Date -
Jul 28, 2011
app pub date -
Jan 28, 2010
filing date -
Jan 28, 2010
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention is directed to a method for removing copper oxide from a copper surface to provide a clean copper surface, wherein the method involves exposing the copper surface containing copper oxide thereon to an anhydrous vapor containing a carboxylic acid compound therein, wherein the anhydrous vapor is generated from an anhydrous organic solution containing the carboxylic acid and one or more solvents selected from hydrocarbon and ether solvents.
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