Processing chamber with heated chamber liner
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United States of America Patent
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May 21, 2013
Grant Date -
Jul 31, 2008
app pub date -
Jan 30, 2007
filing date -
Jan 30, 2007
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A heater liner assembly suitable for covering the interior of a plasma processing chamber is provided. In some embodiments, a liner assembly for a processing chamber can include a heating element embedded in a body. A flange extending outward from an outer diameter of the body includes an upper surface having a sealing surface and at least one pad that extends from the upper surface of the flange to an elevation beyond the sealing surface. The pad contributes to control of the temperature of the liner assembly by maintaining the liner assembly spaced apart from the processing chamber.
First Claim
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- B05C:APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....
- H05B:ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE ....
- A62D:CHEMICAL MEANS FOR EXTINGUISHING FIRES; PROCESSES ....
- B01J:CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS, CO....
- C23F:NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM S....
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