Method of manufacturing piezoelectric vibrating reed, piezoelectric vibrating reed, piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled timepiece
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United States of America Patent
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May 21, 2013
Grant Date -
Jun 2, 2011
app pub date -
Nov 19, 2010
filing date -
Nov 30, 2009
priority date (Note) -
Expired
status (Latency Note)
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Abstract
There are provided a method of manufacturing a piezoelectric vibrating reed capable of improving the reliability of a product by sorting out a defective product correctly, a piezoelectric vibrating reed, a piezoelectric vibrator having a piezoelectric vibrating reed, an oscillator, an electronic apparatus, and a radio-controlled timepiece. In a resist pattern forming step, a resist pattern is formed by performing contact exposure on a photoresist film in a state where a photomask is in close contact with the photoresist film. Before the resist pattern forming step, a photomask treatment step is included in which when a defect is found in an outer shape equivalent region equivalent to the outer pattern in the photomask, a part of a light shielding film pattern is removed to change the shape of the outer shape equivalent region where damage is present.
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