Beam optical component having a charged particle lens
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United States of America Patent
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May 21, 2013
Grant Date -
Sep 25, 2008
app pub date -
Dec 13, 2004
filing date -
Jan 21, 2004
priority date (Note) -
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Abstract
The present invention relates to a beam optical component including a charged particle lens for focusing a charged particle beam, the charged particle lens comprising a first element having a first opening for focusing the charged particle beam; a second element having a second opening for focusing the charged particle beam and first driving means connected with at least one of the first element and the second element for aligning the first opening with respect to the second opening. With the first driving means, the first opening and the second opening can be aligned with respect to each other during beam operation to provide a superior alignment of the beam optical component for a better beam focusing. The present invention also relates to a charged particle beam device that uses said beam optical component for focusing the charged particle beam, and a method to align first opening and second opening with respect to each other.
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