Infrared array sensor

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United States of America Patent

PATENT NO 8445848
APP PUB NO 20120018636A1
SERIAL NO

13262301

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An infrared array sensor includes: a base substrate; cavities which have array structure and are formed on a surface side of the base substrate; and pixel parts supported by the base substrate to cover the cavities, respectively. Each of the pixel parts includes a membrane structure that includes segmented membrane structures divided by slits. Each of the segmented membrane structures includes a thermosensor. Each membrane structure of the pixel parts includes a coupling piece for connecting its own segmented membrane structures to each other.

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Patent Owner(s)

Patent OwnerAddress
PANASONIC CORPORATION1006 OAZA KADOMA KADOMA-SHI OSAKA 571-8501

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tsuji, Koji Suita, JP 40 376

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