Reconfigurable spectroscopic ellipsometer
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United States of America Patent
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May 21, 2013
Grant Date -
Nov 15, 2012
app pub date -
May 13, 2011
filing date -
May 13, 2011
priority date (Note) -
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Abstract
A Mueller ellipsometer of the type having a first rotating element on an incident beam side of a sample and a second rotating element on a reflected beam side of the sample and a detector having an integration time, having a controller for selectively and separately adjusting (1) a first angular frequency of the first rotating element and (2) a second angular frequency of the second rotating element.
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