Method of manufacturing a thin-film magnetic head
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United States of America Patent
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May 28, 2013
Grant Date -
Oct 20, 2011
app pub date -
Jun 2, 2011
filing date -
Feb 10, 2000
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Abstract
A manufacturing method for a thin-film magnetic head including first and second magnetic layers, a gap layer, a thin-film coil, and a coil insulating layer for insulating neighboring ones of turns of the thin-film coil. The manufacturing method includes the steps of: forming the first magnetic layer; forming the gap layer on the first magnetic layer; forming the second magnetic layer on the gap layer; forming the thin-film coil; and forming the coil insulating layer. The coil insulating layer is formed by stacking a plurality of insulating films formed by chemical vapor deposition.
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