Semiconductor test system and relay driving test method therefor
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United States of America Patent
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Jun 4, 2013
Grant Date -
Aug 11, 2011
app pub date -
Oct 16, 2009
filing date -
Oct 24, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
It is aimed to provide a probe card test system and a relay driving test method for probe cards which can automatically and continuously perform tests without bringing needle tips into contact with a number of relays mounted on a probe card and by using a device. In a probe card test system for testing a probe card using a tester, the probe card includes a substrate having a first probe and a first relay connected to the first probe, a relay controller for the first relay and a first measurement channel for connecting the first relay and the first probe to the tester are further provided on the substrate. The tester includes a DC power supply, a control board for controlling the relay controller for the first relay, and a first measurement circuit connected to the first measurement channel, the DC power supply and a voltmeter. The first measurement circuit includes a first resistor having a predetermined time constant and a first changeover switch to be connected to the first measurement channel. The DC power supply and the first resistor are connected to the first changeover switch, and the first measurement channel is switchingly connected to the DC power supply or the first resistor by the first changeover switch.
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